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Optical Interference Film Thickness Measurement Device 'Model 3100'

An industry-standard machine boasting a large number of delivery achievements! Equipped with linear array photodetectors.

The "Model3100" is an optical interference film thickness measurement device that employs linear array elements in the light-receiving sensor, enabling high-speed measurements. By standardly equipping spectral analysis software, it allows for simultaneous measurement of multilayer films (typically up to three layers) and the measurement of optical constants (n, k). It enables fine parameter settings suitable for various film characteristics, allowing for more diverse film thickness measurements of various film structures. 【Features】 ■ Capable of measuring up to 70μm equivalent to an oxide film with a high-sensitivity, high-resolution head (optional) ■ A 100x lens (with a micro spot of φ0.75μm) is also available ■ Easy implementation of program settings for special film measurements suitable for the process ■ Supports various applications (magnetic heads, FPD, material research, etc.) and allows for the creation of sample stages tailored to specific uses (optional) *For more details, please refer to the PDF materials or feel free to contact us.

  • Optical Measuring Instruments

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光干渉式膜厚測定装置『TohoSpec3100』

R&D分野において利用出来る特長を兼ね備えた光干渉式膜厚測定装置!

『TohoSpec3100』は、ナノメトリクス社より技術移管された 光干渉式膜厚測定装置です。 多数の納入実績を誇る業界標準機で、測定再精度2Å以下を実現、 リニアアレー受光素子を採用。 高信頼性、高精度、高速をコンセプトとしており、多層膜同時測定や 光学定数(n,k)測定に利用可能です。 【特長】 ■スペクトル解析ソフトにより、多層膜(通常3層まで)の同時測定,  光学定数(n,k)の測定が可能 ■各種膜特性に適合したパラメータの設定ができ、  より豊富な各種膜構造の膜厚測定が可能 ■プロセスに適合した特殊膜測定用のプログラム設定が容易に実現可能 ■米国マイクロソフト社のWindows(R)7対応 ※詳しくはPDFをダウンロードして頂くか、お気軽にお問い合わせ下さい。

  • Optical Measuring Instruments

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